Biens d'équipement
Vacuum vapor deposition furnace
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Main technical data of Vacuum vapor deposition furnace |
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Model |
Effective working dimension mm(Φ×H) |
Max temperature ( ℃) |
Ultimate pressure (Pa) |
Pressure rising rate (Pa/h) |
IF power (KW) |
IF frequency (HZ) |
Temperature Uniformity (℃) |
RVIC-100 |
350×700 |
1800 |
7×10-1 |
0.67 |
100 |
2500 |
±10 |
RVIC-160 |
550×800 |
1800 |
7×10-1 |
0.67 |
160 |
2000 |
±10 |
RVIC-250 |
700×1000 |
1800 |
7×10-1 |
0.67 |
250 |
2000 |
±10 |
RVIC-350 |
900×1500 |
1800 |
7×10-1 |
0.67 |
350 |
1000 |
±10 |
RVIC-500 |
1200×1500 |
1800 |
7×10-1 |
0.67 |
500 |
1000 |
±15 |
ZGC series vacuum induction vapor deposition furnace is suitable for the chemical vapor deposition of carbon - carbon composite material, such as aircraft brake pads, etc.It also be used as a sintering,high temperature carbonization and graphitization of cemented carbide products.Therefore, it is a essential equipment for scientific and institutional research, the production of aviation, aerospace materials.
Its working principle is under the condition of vacuum or protective atmosphere, using the method of medium frequency induction heat graphite crucible which is placed in the induction coil. Under a certain vacuum degree and ventilated with dilute hydrocarbon gases, the carbon and carbon composite material in the graphite crucible is heated to the specified temperature. The carbon active genes in the gas breakdown and deposit on the material surface.
The main features
1 High automation, the whole process can be automated, with stove working state simulation screen,the equipment running status can be displayed real-timely.It is quipped with the PLC programmable controller or the man-machine interface control system.
2 High security, PLC realizes the safety chain, with sound and light alarm when sensor broken accidentally and working temperature, water pressure, furnace pressure, water flow and water temperature gets too high.
3 Equipped with internal or external type fast cooling system to improve the work efficiency.
4 The application of advanced instrument, such as temperature, vacuum detection and sensing element to ensure equipment reliability.
5 Accurately control all kinds of traffic flow by the mass flow controller, using the pressure regulator to dynamically control the the furnace pressure, under the condition of monitoring for the chemical vapor deposition process.
6 With special dust filter can effectively protect the vacuum pump, prolong the service life of vacuum pump
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