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Vacuum vapor deposition furnace

Main technical data of Vacuum vapor deposition furnace

Model

Effective working

dimension

mm(Φ×H)

Max

temperature

( )

Ultimate

pressure

(Pa)

Pressure

rising rate

(Pa/h)

IF

power

(KW)

IF frequency

(HZ)

Temperature

Uniformity

()

RVIC-100

350×700

1800

7×10-1

0.67

100

2500

±10

RVIC-160

550×800

1800

7×10-1

0.67

160

2000

±10

RVIC-250

700×1000

1800

7×10-1

0.67

250

2000

±10

RVIC-350

900×1500

1800

7×10-1

0.67

350

1000

±10

RVIC-500

1200×1500

1800

7×10-1

0.67

500

1000

±15

ZGC series vacuum induction vapor deposition furnace is suitable for the chemical vapor deposition of carbon - carbon composite material, such as aircraft brake pads, etc.It also be used as a sintering,high temperature carbonization and graphitization of cemented carbide products.Therefore, it is a essential equipment for scientific and institutional research, the production of aviation, aerospace materials.

Its working principle is under the condition of vacuum or protective atmosphere, using the method of medium frequency induction heat graphite crucible which is placed in the induction coil. Under a certain vacuum degree and ventilated with dilute hydrocarbon gases, the carbon and carbon composite material in the graphite crucible is heated to the specified temperature. The carbon active genes in the gas breakdown and deposit on the material surface.

The main features

1 High automation, the whole process can be automated, with stove working state simulation screen,the equipment running status can be displayed real-timely.It is quipped with the PLC programmable controller or the man-machine interface control system.

2 High security, PLC realizes the safety chain, with sound and light alarm when sensor broken accidentally and working temperature, water pressure, furnace pressure, water flow and water temperature gets too high.

3 Equipped with internal or external type fast cooling system to improve the work efficiency.

4 The application of advanced instrument, such as temperature, vacuum detection and sensing element to ensure equipment reliability.

5 Accurately control all kinds of traffic flow by the mass flow controller, using the pressure regulator to dynamically control the the furnace pressure, under the condition of monitoring for the chemical vapor deposition process.

6 With special dust filter can effectively protect the vacuum pump, prolong the service life of vacuum pump

Localisation : Room 502,NO.1299 New Jinqiao Road, Pudong New Area, Shanghai, China, 201206 ShangHai,
Personne à contacter : Kevin Liu, 0086 21 50878190

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Vacuum vapor deposition furnace

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deposition, furnace, vapor, vacuum
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