2mhz,13.56mhz,64mhz solid state RF power supply

Solid state RF power generators

Solid state RF generators including 2MHz, 13.56 MHz, 27 MHz, 64 MHz at output power of 1 KW,3 KW,10 KW,20 KW is the frequency most commonly used for plasma processes. Solid state RF generators are the most advanced class generators commercially available. These RF generators are designed for all plasma processes applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs and data storage devices.

Features :

• Frequency Stability 50PPM
• Wide load impedance range
• Excellent reliability

• 型号 Model	规格书 Data sheet	频率 Freq. （MHz）	输出功率 Pout （W）	供电电压 Vin （V）	效率 Efficiency （%）	散热方式 Heat Dissipation	尺寸 Dimension
  Solid-state RF generator—固态射频电源
  WSPS-13.56-1000		13.56	1000	220V	65	Air cooling
  WSPS-13.56-3000		13.56	3000	220V	65	Water cooling
  WSPS-27-1000		27	1000	220V	65	Air cooling
  WSPS-27-3000		27	3000	220V	65	Water cooling
  WSPS-64-1000		64	1000	220V	65	Air cooling
  WSPS-64-3000		64	3000	220V	65	Water cooling
  WSPS-162-1000		162.5	1000	220V	65	Air cooling
  WSPS-162-3000		162.5	3000	220V	65	Water cooling
  WSPS-325-800		325	800	220V	60	Air cooling
  WSPS-325-1500		325	1500	220V	60	Water cooling
  WSPS-325-3000		325	3000	220V	60	Water cooling
  WSPS-433-100		433	100	28V	65	Air cooling
  Solid-state MW generator—固态微波源
  WSPS-433-500		433	500	220V	65	Air cooling
  WSPS-433-1000		433	1000	220V	60	Water cooling
  WSPS-915-200		915	200	28V	60	Air cooling
  WSPS-915-500		915	500	220V	60	Air cooling
  WSPS-915-1000		915	1000	220V	60	Water cooling
  WSPS-2450-100		2450	100	28V	45	Air cooling
  WSPS-2450-200		2450	200	28V	45	Air cooling
  WSPS-2450-500		2450	500	220V	40	Water cooling
  WSPS-2450-1000		2450	1000	220V	40	Water cooling

  Customized solid state RF&MW generator is available .